机械刻划光栅多层复合铝薄膜微结构及力学性能分析

Analysis of Microstructure and Mechanical Properties for the Mechanical Scratching Grating Multi-layer Composite Aluminum Film

目前光栅机械刻划加工是采用在铬、玻璃等基底上通过真空蒸镀一层微米级铝薄膜后,用金钢石刻划刀作直线往复运动加工而成,蒸镀复合铝薄膜的力学性能对刻划成槽的质量影响较大,受铝薄膜真空蒸镀工艺及尺度效应的影响,各批次铝薄膜质量相差也较大。针对当前仅依靠经验估测铝薄膜质量所带来的问题,采用XRD(X-ray diffraction X-射线衍射)与SEM(scanning electron microscope)实验对铝薄膜微结构进行表征,采用纳米压入测试技术对带玻璃基底铝薄膜力学性能进行分析。研究结果表明,分层镀膜是较好控制晶粒尺寸的方法,力学性能受薄膜平均晶粒尺寸与基底影响较大,随着压入深度的增加,弹性模量与硬度呈下降趋势。

Currently,grating mechanical scribing process is corducted by linear reciprocation processing with diamord scribing tool on a chrome or glass substrate deposited with one micron level layer of aluminum film under vacaum conditions.The quality of the deposited composite aluminum film is influenceol by the mechanical properties and vacaum deposition parameters.In order to deeply understarol the influence of parameters on the quality of depositeel fims,XRD（X-ray diffraction）and SEM（scanning electron microscope）were used to charaetiovize the microstructrue of the aluminunu thin film.Nano-indentation testing technique was used to analyse the mechanical properties of the aluminum film with a glass substrate.The results show that the layered caating method is poeforable of controlling the grain size.Mechanial properties is influenced heavily by the film arerage grain size and the substrafe.With the increase of indertation depth,the the elastic modulus and hardness decrease