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从精密加工看计量技术的现状与发展 被引量:5

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摘要 从精密加工的角度 ,着重论述了计量工作的重要性 ,介绍了国内外精密计量的现状、存在问题及发展方向 。
作者 吴敏镜
出处 《宇航计测技术》 CSCD 2000年第2期25-27,共3页 Journal of Astronautic Metrology and Measurement
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  • 1[6]Yasuhiro Takaya, et al..Fundamental Study on the New Probe Technique. Measurement, 1999,25(1):9~18.
  • 2[7]Wei Gao,Robert J.Hochen, et al..Construction and testing of a nanomachining instrument. Precision Engineering,2000,24:320~328.
  • 3[8]Mike Holmes, Robert Hochen, David Trumper.The long-range scanning stage:a novel platform for scanned-probe microscopy.Precision Engineering,2000,24:191~209.
  • 4[11]Yasuhide Takahashi.Optical interferometry for nanometer measurement of a large step.Int.J.,Japan Soc.Prec.Eng.,1994,26(1).
  • 5[20]G.Jger,Dr.-Ing.E.Manske,T.Hausotte,H.-J.Bchner.Nanomeasuring machine.MICRO.Tec 2000 Hannover:551~556.
  • 6[21]G.Jger.Laser-based measurement to nanometer scale accuracy.International Symposium on Laser Metrology for Precision Measurement and Inspection in Industry,1999,Florianopolis(Brazil).
  • 7[22]G.Jger.Precision distance measurement by means of miniaturized interferometers. XIII IMEKO WORLD CONGRESS,1994,Torino (Italy).
  • 8[23]Teague E.,Clayton.J.Vac.Sci.Technol.B,1989,B7(6):1898~1902.
  • 9[24]Xu Y,Smith S T,Atherton P D.A metrological canning force microscope.Precision Engineering,1996,19(1):46~55.
  • 10[26]Zhao Meirong,Qu Xinghua, Wang hailong,Lu Boyin.New Laser Interferometer with OPD Multiplication for Nanometer Measurement. Chinese Journal of Lasers B,1999,B8(5):402.

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