振动传感器的微加速度动态校准

Dynamic calibration of ultra-low acceleration for the vibration transducer

阐述了高灵敏度振动传感器在超低频微小加速度下进行动态校准的校准装置工作原理、校准方法 ,分析了其校准不确定度。该装置采用曲率半径为 10m的虚拟摆结构 ,从较强的环境干扰噪声中利用数字滤波技术成功地拾检微弱振动信号 ,使微小标准加速度获得复现。该装置可在 (0 .0 0 1～ 0 .1)Hz超低频率范围内和 (1× 10 -6～ 1× 10 -2 )m s2 微小加速度范围内实现高准确度激光绝对校准和比较法校准 ,其校准不确定度达 0 .5%。

Describes the principle, calibration method and calibration uncertainty analysis of the calibration system. It can calibrate the dynamic response at ultra low frequency point and acceleration level. The system that produces low acceleration level can pick up low vibration signal of transducer from enviroment noise by digit filtering technology, it has the capability of absoluting or comparing calibration in frequency range of (0.001～0.1) Hz and acceleration range of (1×10 -6 ～1×10 -2 ) m/s 2. The calibration uncertainty is less than 0.5%.