太阳帆板平面度测量系统

Solar Panel Substrate Planeness Measuring System

介绍了一种采用斜光学三角形测量结构和基于虚拟精密测量基准的太阳帆板平面度无接触测量系统 .首次提出斜光学三角形测量结构 ,使得测量系统的测量面积和分辨率大大提高 ,从而实现了对大面积平面平面度的高精度无接触测量 .提出的虚拟精密基准的建模与误差补偿技术 ,解决了在非精密基准上实现精密测量这一难题 ,使得所研制的测量系统利用现有平台可实现对太阳帆板平面度的高精度测量 .此外 ,对测量光斑位置估值精度与光斑图像尺寸大小和能量分布之间的定量关系进行了分析 ,为激光光斑的优化设计提供了理论依据 .实际测量结果表明 ,该测量系统对面积为 2 581mm× 1 755mm太阳帆板的平面度测量精度达 0 .0 2mm(RMS)

A solar panel substrate planeness non contact system is presented, which employs optical triangulation method and bases on virtual precise benchmark. By means of declinate optical triangulation measuring instrument structure which is firstly proposed, the measured area and resolution of this measuring system are greatly increased, and the high accuracy non contact measurement of the planeness of a large area plane is realized. On the basis of a new modeling method of virtual precise measuring benchmark and measurement error compensation technique, the measuring system can accurately measure the solar panel substrate planeness on a non precision plate. In addition, in order to lay a theoretic foundation for optimization design of the laser spot, the relationship between measuring laser spot positioning accuracy and the shape, size and energy distribution of spot image, is analyzed deeply. The actual measurement results show that the measurement accuracy 0.02?mm(RMS) can be obtained when a solar panel substrate (2?581?mm×1?755?mm) planeness is measured by using of this measuring system.