非球面超精密抛光技术研究现状

Review on Ultra-precision Polishing Technology of Aspheric Surface

非球面应用范围的拓展以及应用精度要求的不断提高对非球面元件的尺寸精度与表面质量提出了更高要求;作为终加工手段,非球面超精密抛光技术也越来越受到世界各国的重视。掌握非球面超精密抛光过程中的材料去除机理以及由此导致的亚表面损伤等特性对提高非球面抛光的精度与效率十分重要。对非球面抛光技术的发展进行回顾,并根据非球面超精密抛光技术的发展脉络,阐述当前主要非球面超精密抛光技术的加工原理及加工实例,随后从亚表面损伤、边缘效应等方面对几种非球面超精密抛光技术进行比较,并以提高抛光精度与效率为目标,对非球面超精密抛光技术的发展趋势进行预测。

The requirement of profile accuracy and surface quality for aspherical surface has become higher and higher with the expanding application range and raising application precision demand. As the finishing process, the ultra-precision polishing method for aspherical surface is drawing great attention from countries around the world. For improving the precision and efficiency of aspheric surface polishing, an understanding of the mechanisms of material removal in ultra-precision aspheric polishing, as well as the sub-surface damage imparted, is essential prerequisites. Historical progress of aspheric polishing techniques is plotted, and based on the development of aspheric polishing methods, the present advanced ultra-precision aspheric polishing methods are described with emphasis on the processing mechanisms and examples. The different ultra-precision aspheric polishing methods are compared in terms of sub-surface damage and edge effect. And aiming to high finishing accuracy and high efficiency, the probable further trend of ultra-precision aspheric polishing technology is forecasted.