四氟化硅的工艺研发及进展状况

Research and development on process of silicon tetrafluoride and the progress thereof

四氟化硅是电子工业中的一种重要原料,随着多晶硅等行业迅猛发展需求量逐渐增大。详细介绍了四氟化硅的应用及市场情况,并对氟气合成法、氟硅酸盐热解法、硫酸法、氢氟酸直接反应法这4种主要生产方法进行详细论述,讨论了各工艺方法的生产原理、工艺简述、研究状况并对工艺的优缺点进行了评价。就目前市场形势分析,国内四氟化硅需开发高端产品,以适应市场需求和参与国际竞争。

Silicon tetrafluoride is an important raw material in the electronics industry.Its demand gradually increases with the rapid development of polysilicon and other industries.Applications and market conditions of silicon tetrafluoride were introduced in detail.Four main production methods,such as fluorine synthesis method,fluorosilicate pyrolysis method,sulfuric acid method, and direct hydrofluoric acid reaction method, were elaborated in detail.The principles of production, process flows and research situations of the four methods were discussed.Furthermore, their advantages and disadvantages were also evaluated.According to the present market situation analysis,Chinese silicon tetrafluoride needs to move into the develop- ment of high-end products, in order to adapt to the market demand and to participate in the international competition.