晶硅切磨废弃硅粉为原料的反应烧结Si3N4结合SiC复相陶瓷的正交实验研究

Orthogonal Optimum Design of Reaction Sintered Silicon Nitride Bonding Silicon Carbide Multiphase Ceramics using Crystalline Silicon Cutting Waste Silicon Powder as Raw Material

以磨切单晶硅废料Si粉和SiC为原料,Y2O3-Al2O3-Fe2O3为复合烧结助剂,反应烧结法制备Si3N4/SiC复相陶瓷材料。运用L9（34）正交设计,研究了原料中Si、助剂Al2O3、Y2O3和Fe2O3的含量对陶瓷材料力学性能的影响和优化。采用X射线衍射（XRD）和扫描电镜（SEM）对复合材料的相组成、断口形貌进行分析。结果表明,反应烧结后试样生成Si3N4结合SiC晶粒为主相,及少量SiALON与未反应的Si相的烧结体。Si含量对力学性能的影响最为显著,对于抗弯强度性能,正交试验获得的工艺优化参数：ω（Si）：20%、ω（Al2O3）：3.2%、ω（Fe2O3）：0.8%和ω（Y2O3）：2%。

Si3N4 bonded SiC multi-phase ceramics were fabricated by reaction sintering using kerf loss Si powder in solar cell wafer and SiC as raw materials,Al2O3-Y2O3-Fe2O3 as sintering additives.A group of orthogonal test is arranged and carried out to study the effect of raw materials on mechanical properties.The microstructures and the fracture morphology of composites were observed by SEM and the components were analysed by XRD.The results show that sintered densities contain Si3N4 conbination SiC phase,a small amount of SiALON and residual Si.Amount of Si is the most significant factor affecting the mechanical properties.For fracture strength,the optimized technological parameters are ω（Si）：20 %、ω（Al2O3）：3.2 %、ω（Fe2O3）： 0.8 % and ω（Y2O3）：2%.