摘要
Cu-doped AlSb polycrystalline films were grown on quartz glass by magnetron co-sputtering.The structural,morphological and electrical properties of the films were studied.The incorporation of copper atoms can result in the increase of lattice constants,and annealing is helpful to eliminate this deformation.Cu-doped AlSb films exhibit weak n-type conductivity.The results show that the doping effect has a close relationship with the annealing process,meaning that the position of Cu atom in AlSb polycrystalline films might influence the doping effect.
Cu-doped AlSb polycrystalline films were grown on quartz glass by magnetron co-sputtering.The structural,morphological and electrical properties of the films were studied.The incorporation of copper atoms can result in the increase of lattice constants,and annealing is helpful to eliminate this deformation.Cu-doped AlSb films exhibit weak n-type conductivity.The results show that the doping effect has a close relationship with the annealing process,meaning that the position of Cu atom in AlSb polycrystalline films might influence the doping effect.
基金
Project supported by the National Basic Research Program of China (No.2011CBA00708)
