恒压式气体流量计变容室截面面积测量技术研究

Research on Section Area Measurement Technology of Variable Volume Chamber for Constant-pressure Gas Flow Meter

为了研制恒压式气体微流量计,设计了以波纹管为主体的变容室,并对波纹管变容室截面面积进行了测量。采用多项式拟合公式对波纹管截面面积测量结果进行了修正,避免了波纹管非线性的影响,结果表明修正后偏差小于0.16%,截面面积的测量结果合成标准不确定度小于0.53%,可以满足使用要求。

For developing constant-pressure chamber has been designed. And the section area 1 gas micro-flow meter, the bellows variable volume has been measured. The section area value of bellow variable volume chamber is corrected by polynomial formula to avoid non-linearity effect of bellows. The corrected deviation is less than 0.16%, and the relative combined standard uncertainty of measurement is less than 0.53%.