双层侧向位置敏感探测器的畸变研究

Study on Distortion of Duo-lateral Position Sensitive Detector

阐述了半导体光电位置敏感器件双层结构、特点,在此基础上,利用三层前置反馈网络对光电位置敏感器件的空间非线性以及畸变产生的机理进行了分析,尤其是对在位置敏感器件边缘的非线性作了分析研究;提出了一种适于位置敏感器件的敏感前置放大器电路和产生双极脉冲的分光滤波器;通过实验模拟,验证了上述理论和方法的正确性,并对双层结构的位置敏感器件在精密探测中的应用作了展望。

The structure and characteristics of duo-lateral position sensitive detector are expatiated,based on which,the generation mechanism of the spatial non-linearity and distortions,especially the edge non-linearity,are analyzed with three-layer feedforward network.A sensitive preamplifier suitable for position sensitive devices and a spectral filter giving birth to bipolar pulse are put forward.Experimental simulations validate the correctness of the proposed method.The application prospect of duo-lateral position sensitive detector in exactitude exploration.