摘要
为了实现快速反射镜系统(FSM)的性能预测和快速设计,建立了两轴FSM的动力学模型,并提出了基于该动力学模型的FSM设计方法。介绍了FSM的结构与工作原理,推导了FSM的理想动力学模型,分析了FSM的高阶谐振和轴间耦合,建立了二自由度FSM整体模型。基于该模型,设计了某型FSM的主要参数,并进行了性能仿真。根据所设计的参数制作了FSM试验样机,测试了样机性能。试验结果表明:模型性能仿真结果与试验样机测试结果基本一致,系统带宽达到250Hz以上,调节时间小于15ms,超调量小于8%,定位精度优于20μrad。结果表明,设计的FSM样机性能满足指标要求,验证了该设计方法的有效性和正确性。
To design a Fast Steering Mirror (FSM) system rapidly and to predict its performance, a FSM dynamic model with two Degree of Freedom (DOF) was established, and a design method for the "dynamic model-based design of FSM" was investigated. The structure and operating principle of the FSM was described, and an ideal dynamic model of FSM was derived. Then, the high-order resonance and the coupling between the axes were analyzed and a two DOF integrated model of FSM is estab- lished. Based on the FSM model, main parameters for design parameters, a FSM prototype was produced and the FSM were determined. According to the its performance was tested. The results indi- cate that the simulation performance obtained by the FSM model is coincident with the experimental performance of the FSM prototype well. Moreover, the FSM shows its bandwidth more than 250 Hz, adjusting time less than 15 ms, overshoot less than 8%, and position accuracy better than 20 μrad. These results demonstrate that the FSM prototype can satisfy the design requirements. It verifies the validity and correctness of the design method.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2013年第1期53-61,共9页
Optics and Precision Engineering
基金
国家自然科学基金重点项目(No.51135009)
国家自然科学基金资助项目(No.50805144)
关键词
快速反射镜
快速设计
激光束控制
动力学建模
fast steering mirror
rapid design
laser beam control
dynamic modeling