3[4]Joseph F.Management and design of process exhaust systems in an I/C manufacturing environment for emission minimization.Institute of environmental sciences and technology proceedings,1998:497 ~ 504
4[7]Jack Martyak.Practical designs for deionized water recycle systems in the semiconductor industry.Institute of environmental science and technology proceedings,1998:164 ~ 171
5[8]Ron Chiarello,Multidisciplinary approaches target EX&H,Semiconductor International 1999,22:62 ~ 66