摘要
作者利用光学实验中的常规仪器完成了椭偏法测量薄膜的厚度与折射率,探讨了减小误差,提高测量精度的措施.文中还对文献[2]中某些易于产生困惑之处做了分析并给出了合理的解释.
The refractive index and thickness of films are measured by common optical instruments according to the rule of ellipsometry, with some measures taken to improve the measure accuracy. It is pointed out that the transforn relationship between （P1, A1 ） and （P2, A2 ） are the same whether the direction-angle of the fast axis of the aquarter wave plate is α = ,π/4, or α = - π/4.
出处
《南京晓庄学院学报》
2012年第6期26-30,共5页
Journal of Nanjing Xiaozhuang University
关键词
椭圆偏振术
薄膜厚度
折射率
1
4波片快轴
ellipsometry
thickness of films
refractive index
fast axis of the aquarter wave plate
