摘要
利用多物理场耦合分析软件COMSOL Multiphysics4.2对多晶硅铸造过程进行模拟仿真,得到轴向磁场作用下多晶硅定向生长过程中的流场和温度场分布,以及磁场对坩埚内流场和温度场的影响,并分析了磁场作用机理,为磁场在多晶硅生产中的应用提供了参考依据。
The casting process of polycrystalline silicon was simulated by multi-physics coupling field analysis software COMSOL Multiphysics 4.2, the distribution of flow field and temperature field in polysilicon directional growth process and the effects of magnetic field on the flow field and temperature field within the crucible were obtained under axial magnetic field. The action mechanism of magnetic field was analyzed, which provided the reference and basis for the application of magnetic field in polycrystalline silicon production.
出处
《铸造技术》
CAS
北大核心
2013年第1期61-64,共4页
Foundry Technology
基金
国家自然科学基金资助项目(项目编号:51164033)
江西省教育厅科技项目(11739)
校级招标课题xj0901
关键词
轴向磁场
多晶硅
数值模拟
流场
温度场
axial magnetic field
polysilicon
numerical simulation
flow field
temperature field
