迎接亚微米技术时代的到来

Greet the Advent of the Era of Sabmicron Technology

半导体与信息技术是实现未来技术革命、产业现代化和社会文明的先导技术,其基础是半导体器件与集成电路及集成传感器。要进一步提高现有半导体产品的性能水平,关键是实现亚微米、深亚微米加工技术。本文着重叙述了当前世界上亚微米技术的发展趋势。最后简要地分析了我国亚微米技术的现状和发展。

Semiconluctor technology and information techno- logy are guide ones for realizing the coming technological revo- lution, industrial modernization and social civilization, The fundation is semiconductor devices and IC, and integrated sen- sors. The key for further increasing the performances of semiconduc- tor products is the achievement of microfabrication for submicron and deep submicron. The paper emphatically describes the present tendency of submicron technology in the world, and briefly analy- zes the state of the art of that in China.