半导体表面晶体完整性的SEM电子通道花样研究

Study on Crystal Perfection of Semiconductor Surfaces by SEM Electron Path Patterns

本文对各种GaAs晶体表面作了SEM电子通道技术测量,对测得的电子通道花样进行了结晶学注释,确定了评价晶体完整性的标准。可广泛用来检查和评估半导体表面的晶体完整性.

Various GaAs crystal surfaces have been investigated with SEM electron passage patternmethod. Crystallography annotations have been made, and a standard to evaluate the crystalperfection has been defined. The method can be widely used for examining and appraisingthe crystal perfection of semiconductor surfaces.