摘要
本文用单陷阱电荷俘获模型研究了电场调制效应对氧化层电流弛豫谱(Oxide CurtentRelaxation Spectroscopy)——简称 OCRS的影响.给出了精确的 OCRS谱函数及其各级近似表述式;给出了确定陷阱参数(俘获截面,荷心及面密度)的精确公式及各类简化式;给出了各类近似成立的直观实验判据式.对实验结果进行了电场修正,得到了更为满意的结果.
The effect of electric field modulation on OCRS (Oxide current Relaxation Spectroscopy)has been studied based on single trap charge trapping model.The precise and approximateexpressions of OCRS are presented.The precise formula and various approximate formulashave been given to determine the trap parameters (capture cross section,centroid,and density).Various approximate experiment discriminants have been obtained.The experimental resultsare corrected, and more satisfied results have been obtained.
