FRED的特性参数及其外延材料的研制

Characteristic Parameter of FRED and R&D of Epitaxial Layer

随着绿色节能产品的发展,高频开关电源的应用越来越深入和广泛。高频大功率开关电路中主开关器件与快恢复二极管(FRED)配合使用,性能良好的FRED对提高开关电源的总体性能是至关重要的。文章对FRED的特性参数给出详细的描述,对一些关键参数与外延层的关系进行了探讨。依据FRED对外延片的特殊要求,选用缺陷低和特殊背损的衬底片,采取特殊外延工艺技术,减少外延层缺陷,使片内均匀性达到2%以下。

As the development of green power production,the application of high frequency switch power supply is deeper and widely.The main switch device in high frequency power switch circuit work with Fast Recovery Epitaxial Diode（FRED）.It is critical to improve total capacity switch power supply that the good capacity of FRED.The paper give a detailed description of FRED characteristic parameter,discussing of the relationship between parameter and epitaxial layer.According the special requirement of FRED’s epitaxial layer,selecting low defector and special back damage wafer,taking special epitaxial process technique,reducing epitaxial defector,manage to improve the within wafer uniformity to below 2%.