摘要
微机械加速度传感器的检测模态特征频率和有效量程是进行传感器设计时必须要考虑的2个重要参数。文中在对传感器检测模态频率进行有限元分析的基础上,利用电路仿真软件Multisim对传感器等效电路进行了谐振频率分析,并根据线性度指标求得了传感器的有效量程,为微机械加速度传感器的设计提供了参考。
The mode frequency and measuring range both are significant for designing of micro-machined accelerometer. The natural frequency and typical modal analysis were carried out by simulation of finite element method. The series phase resonance frequency of the equivalent circuit was carried out by Muhisim as well. The measuring range of the accelerometer was carried out based on the linearity.
出处
《仪表技术与传感器》
CSCD
北大核心
2012年第12期1-2,8,共3页
Instrument Technique and Sensor
基金
国家自然科学基金青年科学基金项目(51179197)
