YBa_2Cu_3O_(7-x)超导薄膜的离子束改性

Ion Beam Modification of YBa_2Cu_3O_(7-x) Superconducting Thin Films

本文主要研究了离子注入对YBa_7Cu_3O_(7-x)薄膜超导性质的影响.测量了Ar离子注入剂量与超导转变温度T_c之间的关系.实验结果表明,高质量的YBa_2Cu_3O_(7-x) 超导薄膜具有一定的抗辐照性.随着注入剂量的增加,临界电流密度I_c下降很快,但零电阻转变温度T_c却下降较慢.分析和讨论了离子注入对YBa_2Cu_3O_(7-x)中一维Cu-O链和二维Cu-O面的影响,探讨了离子束改性手段在YBa_2Cu_3O_(7-x)超导薄膜图形加工中应用的可能性.

The effect of Ar ion implantation on superconducting properties of YBa_2Cu_3O_(7-x) thinfilms have been studied with resistance measurements and X-ray diffraction. The experi-mental results show that YBa_2Cu_3O_(7-x) films with high quality had some resistibility to ion ir-radiation.As the Ar ion dose increases,The transition temperature T_c decreases slowly, butthe critical current density J_c deceases very fast We discussed the influence of Ar ion implan-ration upon one-dimensional Cu-O chains and two-dimensional Cu-O planes.We also explo-red the possibility of using ion implantation technique to pattern YBa_2Cu_3O_(7-x) superconduc-ting thin films and to make superconducting electronic devices.