紫外激光作用频率对吸收玻璃的微孔加工研究

The influence of ultraviolet laser frequency on characters of micro-hole in absorbing glass

采用紫外激光烧蚀材料微孔具有效率高,成本低等优势。本文主要研究了在固定激光脉冲能量下,紫外激光脉冲重复频率对吸收玻璃的微孔加工特性的影响。研究发现,紫外重复脉冲对材料的去除主要是基于单脉冲效应:频率较低时,相应单脉冲的能量较大,激光烧蚀材料所产生的温度较高,激光等离子体冲击效应较强,这样将引起孔周围断裂;随着脉冲作用频率的增加以及相应能量的减小,热效应减小,使得烧蚀孔周围的断裂痕迹逐渐消失,且孔深度方向逐渐变浅。通过控制脉冲作用频率可以实现对孔的定性烧蚀。

The ultraviolet lair has much advantage in nfieroholes machining, such as high efficiency, low cost. It has studied ma the inlluenee of ultraviolet laser pulse repetition rate on eharactes of the micro - holes in absotion glass at the fixed output power. The results show that the removal of material under high repetition pulsed is nminly based on single pulse action mechanism. For the lower frequeney, the according single pulse energy is high as well a.s the according temperature ridr. In this case, the action of laser plasma is obvious, which carl make the hole fraeturexl. With the inerea of pulse frequency, the eorresnding energy of single laser decreases the thernral effect becomes less obvious, the fractures disappear inlet depth of miert - hole beeomes shallower. The different qualitative of holes ean he aehievet through ehmaging the las.er pulse repetition rate.