摘要
植入式眼压检测微系统是一种植入到眼内进行眼内压连续检测并通过电磁波传输到体外的微系统。根据该系统近些年的研究进展对该系统进行综述,介绍了该系统常采用的LC振荡结构和SoC结构的原理和发展历程,并对其主要技术指标和制作工艺以及存在问题进行论述;结合生物电磁效应、MEMS技术和集成电路技术等,综合分析了SoC系统的天线、电路系统和压力传感器等关键技术的发展现状、存在的问题和突破方向;对生物兼容性材料和植入位置等应用层面进行总结和展望;最后根据对该系统存在问题的总结,对该系统的发展趋势进行展望。
The implantable intraocular pressure detection microsystem is a system which can be implanted in eyes to detect intraocular pressure continuously and transmit the signal to outside.The system is summarized according to the research progress of the system in recent years.The principle and development of LC oscillation and SoC structure always used in the system are introduced,and the main technical indexes,fabrication process and existing problems are analyzed.Based on bioelectromagnetics,MEMS technology and IC technology,the development status,existing problems and breakthrough directions of the key technologies such as antenna,circuit system and pressure sensor are analyzed.Then the application level problems such as biological compatibility materials and implant position are summarized and prospected.At last,the deve-lopment direction of the system is prospected according to the existing problems of the system.
出处
《微纳电子技术》
CAS
北大核心
2013年第1期57-63,共7页
Micronanoelectronic Technology