图象式绝对码位移测量系统的研究

Study on an Image Absolute Code Displacement Measuring System

在分析了传统光学式位移测量系统及现代数字化位移测量系统优缺点的基础上 ,提出一种新的图象式位移测量系统 ,该系统与传统位移系统相比 ,具有精度高、抗干扰能力强、长期稳定性好、应用范围广等优点。给出了新系统的结构、工作原理 ,讨论了系统实施的精度保证措施。最后 ,分析了系统的精度 ,并通过实验与双频激光干涉仪的测试结果进行了比较。

A new image displacement measuring system is proposed on the basis of analyzing the advantages and disadvantages of the traditional optical displacement measuring system and modern digital displacement measuring system.Compared with the traditional displacement measuring system,the new system has the advantages of high accuracy,strong anti interference capability,excellent stability in long term and wide application range.The constitution and operating principle of the new system are given.The measures for keeping accuracy are discussed.The accuracy of the system is analyzed in the end.A comparison is carried out by the results of experiments and double frequency laser interferometer.