摘要
利用最小能量法和均匀压力载荷下的圆薄膜大变形半解析解相结合的方法,改进了静电驱动柔性振膜微泵的理论分析模型。计算结果表明:考虑圆薄膜的周向应变,利用均匀压力载荷下的圆薄膜大变形半解析解来预测振膜的形状,对微泵的性能有显著的影响,证明了圆薄膜大变形时的周向应变是不可忽略的。同时讨论了介电层厚度、腔体形状和双腔结构对微泵压缩性能的影响。结果表明:采用双腔结构,减小介电层厚度、减小腔体深度、缩小腔体半径,对静电驱动柔性振膜型微泵性能的提高具有积极意义。
The theoretical analytical model for electrostatically actuated flexible diaphragm micropump is improved through the combination of energy minimization method and the analytical solution for large deformation of round membrane deformation under uniform pressure.The calculation results show that the tangential strain of the membrane considered in the calculation of membrane deflection exhibits great influence on the performance of the pump.The influence of dielectric layer thickness,cavity geometry and double-cavity structure on characteristic of pump compression is also discussed.The result shows that reducing the dielectric layer thickness,cavity depth,radius of cavity,by using double-cavity structure,has positive meaning to improve character of micropump electro-statically actuated diphragm.
出处
《传感器与微系统》
CSCD
北大核心
2013年第1期25-28,32,共5页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(50976067)
关键词
静电驱动
柔性振膜
微泵
圆薄膜大变形
electrostatically actuated
flexible diaphragm
micropump
large deformation of round membrane
