微气体传感器结构设计和优化

Design and optimization of structure of micro gas sensor

设计了一种新型微气体传感器的电极结构,这种共平面型电极结构消除了加热器产生的磁场对测量信号的干扰。利用铂作为电极材料,SiO2作为隔热层,利用有限元软件分析优化,当SiO2,Si的厚度分别为50,250μm,加热电极的宽度、信号电极的宽度和间距分别为150,15,60μm时,传感器获得的中心温度较高且比较均匀的中心温度分布,有利于传感器整体性能的提高。

A new type of electrode of micro gas sensor is designed.This type of coplanar electrode structure eliminates interference of magnetic field from heater on measuring signal.Pt is used as electrode material,SiO2 as thermal insulation layer.Analysis and simulation are carried out by ANSYS.It is found that when the thickness of SiO2 and Si are respectively 50 and 250 μm,widths of the heating and detecting electrode and spacings between the detecting electrodes are respectively 150,15 and 60 μm,higher temperature and uniform temperature distributing in the center are obtained,which is benefit to enhancement of overall performance of the sensor.