摘要
介绍了国内外正压漏孔校准技术的研究概况,对校准装置的原理和组成进行了详细说明,对采用的校准方法进行了分析和讨论。以此为基础,归纳总结了正压漏孔校准技术中所涉及的关键技术,分析了技术发展的总体趋势,并对我国正压漏孔校准技术的研究工作提出了建议。
The studies on pressure leak calibration technologies at home and abroad are introduced, with the operating principle and construction of calibrators described and discussed in detail, as well as the existing calibration methods. Then, the key technologies involving the pressure leak calibration are summarized with its developmental trend analyzed. Several suggestions are therefore given to the R&D of pressure leak calibration technology in China.
出处
《真空》
CAS
2013年第1期41-47,共7页
Vacuum
关键词
真空计量学
正压漏孔
校准技术
综述
vacuum metrology
pressure leak
calibration technology
review