对吸气剂除气有关要素的探讨

On the factors of getter’s degassing

除气是吸气剂产品生产的关键环节,为了优化除气工艺做过不同形式的技术探讨。在用质谱进行这方面探讨中、初步得到了比较清晰的数据结果、为日后进一步工作做了准备。本文简要介绍这方面情况并进行有关讨论。

Getter＇s degassing is a key step in the getter production. Some investigations were made for technology advances of degassing process. The quadrupole mass spectrometry for characterizing the getter＇s degassing was described and dicussed in this paper.