干涉光非接触式读出压力传感器

Optical Interference and Contactless Read-out Pressure Sensors

本文介绍一种新型压力传感器,它有别于压阻型和电容型压力传感器,利用固定玻璃板和对压力敏感的硅弹性膜之间的Fabry-Perot腔所产生的光线干涉原理制成。这种传感器可避免封装应力及热漂移对信号的影响,因而可在500～1000℃的高温下使用。

This paper introduces a new type of pressure sensors different from the piezo-resistance and capacitance type, which uses the principle of optical interference arisen from Fabry-Perot chamber between a fixed glass plate and the silicon elastic film sensitive to the fluid pressure. This type of pressure sensors can avoid the influence on signal from the mounting stress, thermal drift, so it can be used at temperatures of 500~1000℃.