摘要
利用有限元法计算分析了以阴极尖锥阵列体作为力敏感膜的形变特性，给出了用表达式计算尖锥阵列体形变的修正值，为后继工作提供了可以选择的技术途径。
Deformation characteristics of the field-emission array as pressure sensing film of the sensor has been investigated using the finite element analysis(FEA)method. The revised factor,which is used to calculate the deformation of the field-emission array .is obtained. The result provides useful information for future works.
出处
《微电子学》
CAS
CSCD
北大核心
2000年第4期238-240,共3页
Microelectronics
关键词
场发射
压力传感器
力敏感膜
形变
有限元法
Field emission
Pressure sensor
Pressure sensing film
Deformation
Finite element analysis
