SOI功率器件的新进展

The New Evolution of the SOI Power Devices

回顾了应用于 SOI功率集成电路的 SOI功率器件的发展背景 ,论述了 SOI功率器件的开发现状 ,以及作为 SOI功率器件基础的 SOI材料制备技术和耐压结构研究的最新进展。同时指出了在 SOI功率器件研究中需要解决的问题 。

In the paper the development background of the SOI power devices is reviewed, which are applied to the SOI power integrated circuit (PIC). The current situations of the SOI power devices are discussed, and the latest evolution of the SOI material and the high voltage structure are given.Meanwhile the problems in the study of the SOI power devices are pointed out,and the future development is forecasted.