羰基钼化学气相沉积对模具表面改性的研究

Study on modification of instrument surface by the vapour deposition of molybdenum hexacarbonyl

以Mo(CO) 6 为物源在刀具钢回火温度以下实施了气相沉积超硬膜涂覆 ,经实验测试、分析 ,结果表明薄膜中含碳量是影响薄膜表观硬度的重要因素 ,并且该薄膜能改善刀具 (钻头 )的表面力学性能 。

The preparation of super-hard membrane on th e steel instrument under the tempe ring point by metal organic chemical vapour deposition(MOCVD) of Mo(CO)\-6 have been developed . It showed that the carbon contents in deposited membrane are a main effect of inflecting the hardness of membrane and improving the surface sta te and service life.