衍射微透镜阵列的光学性能研究及测试

Optical Properties Theory and Measurement of Diffractive Microlens Arrays

对衍射微透镜阵列的光学性能进行理论上的研究 ,并提出一种测试微透镜阵列衍射效率和点扩散函数的方法 ,建立了一套测试系统 ,并对本所研制的 12 8× 12 8衍射微透镜阵列的衍射效率和点扩散函数进行了测试。测试结果证明本所研制的 2位相的石英和硅衍射微透镜阵列的性能较好 ,均匀性较高 ;而由于工艺和光刻系统的限制 ,4位相衍射微透镜的制作还存在一些不足 ,这些都可以从所得到的衍射微透镜的点扩散函数曲线图和衍射效率看出。该方法适于测试具有微小单元尺寸、周期排列的微透镜阵列或单元的衍射效率和点扩散函数。

WT5,5”BZ]The Point Spread Function(PSF) and diffractive efficiency are important tools to characterize the information transfer through optical elements.They give useful information about the resolution.In the paper,the optical properties of diffractive microlens arrays are analyzed theoretically and a method of testing the optical properties is advanced,an effect,simple system for testing the PSF and diffractive efficiency of diffractive microlens array is established.The testing results can help the producers find technologic error in the procedure of design and etching microlens arrays.