摘要
超磁致伸缩薄膜是一种性能优良的新型微驱动元件 ,文章介绍了超磁致伸缩薄膜驱动的原理 ,综述了薄膜型超磁致伸缩微执行器的开发和最新研究成果 ,重点介绍了薄膜型超磁致伸缩微执行器在微流体控制系统、线性超声微马达及微小型行走机械中的应用 ,并对超磁致伸缩薄膜在微执行器中的应用进行了展望。
Giant magnetostictive thin film is a new type of actuating components with high performance.Based on many references,the article introduces the actuating principle of giant magnetostictive thin film,describes the latest research results of giant magnetostrictive thin film microactuators.Emphasis on the application to microfluid control system,linear ultrasonic micromotor and micro walking mechanism.A prospect is made for the progress of giant magnetostictive thin film in microactuators.
出处
《压电与声光》
CSCD
北大核心
2000年第3期157-159,167,共4页
Piezoelectrics & Acoustooptics
