摘要
基于标量衍射理论 ,首先得出线宽增加情况下 4阶二元光学元件衍射效率的解析式 ;并以 4阶、8阶二元光学元件为例 ,进行计算机模拟并系统分析线宽增加和线宽减小两种情况下 ,线宽误差对二元光学元件衍射效率的影响。指出线宽误差对二元光学元件衍射效率影响较大。模拟计算结果对二元光学元件的制作提供重要的理论指导。
Based on the theory of scalar diffra cti on,a formula for the diffractive efficiency of linewidth increasing error for th e 4 step BOE is obtained;Choosing 4-step and 8-step BOE for example,we simulat ed by computer and analyzed systematically the effect of linewidth error on diff ractive efficiency in the case of linewidth increase and linewidth decrease.It i s pointed out that the linewidth error has very large effect of BOEs diffracti ve efficiency.The results of computer simulation can provide important theoretic al basis for the fabrication of BOE.
出处
《光电子．激光》
EI
CAS
CSCD
2000年第3期279-281,297,共4页
Journal of Optoelectronics·Laser
关键词
二元光学元件
线宽误差
衍射效率
binary optical element
linewidth er ror
diffractive efficiency
computer simulation
