ISG工艺合成SrTiO_3纳米粒子薄膜

SYNTHESIS OF SrTiO_3 THIN FILM WITH NANOPARTICLES BY SOL-GEL METHOD

采用 ISG工艺 ,在氧化铝陶瓷基片上合成 Sr Ti O3陶瓷薄膜 ,研究了溶胶性能和溶胶 -凝胶的晶化过程 ,分析了薄膜的形成及结构 .结果表明 ,Sr O- Ti O2 复合氧化物系统由凝胶向结晶相的转变过程中 ,无简单氧化物等中间相生成 ,经 40 0～ 80 0℃ ,0 .5 h,可生成结晶度较好的单一的立方 Sr Ti O3相 .Sr Ti O3陶瓷薄膜晶粒为 1 0 nm左右 .

Study on the formation of SrTiO 3 thin film on Al 2O 3 ceramic substrate has been made.The films were prepared by sol gel,when soluble inorganic salts——titanium tetrachloride and strontium chloride——were used as raw materials.In the paper the crystalline transform and the function of complex agents (citric acid etc) were mainly discussed.The results show that by using of citric acid etc.the sol is stable and the component distribution of the gel is uniform,thus the middle oxide in the SrO TiO 2 sytstem is not produced during the transition process from gel to cystal.The single cubic phase strontium titanate thin film with perovskite phase can be synthesized at low temperature.