纳米TiO_2薄膜的制备及其光学特性研究

Preparation and Optical Characteristics of Nanocrystalline TiO_2 Thin Film

采用溶胶 -凝胶法制备了纳米TiO2 薄膜 .XRD研究表明 ,纳米TiO2 薄膜随着热处理温度的升高 ,发生了从非晶状态向锐钛矿相的转变 ,最后转化为金红石相 .UV -VIS、SEM研究表明 ,纳米TiO2 薄膜的致密度与成膜条件有关 .Raman表明 ,随热处理温度的升高 ,纳米TiO2 薄膜的振动峰位发生移动 ,并且谱带明显宽化 ,表现出尺寸效应 .

Nanocrystalline TiO 2 thin films are prepared by the sol-gel process The structure of the thin films at different annealing temperatures are studied by XRD Using Raman and UV-VIS spectroscopy, the optical characteristics are studied, The results show that the Raman and UV-VIS absorption peaks of TiO 2 thin films shift to lower frequencey as the grain-size become small