影响HFCVD金刚石晶核孕育期的几种因素

Some effects on the duration of HFCVD diamond nuclei incubation.

首次总结了影响热丝 CVD金刚石晶核孕育期的几种因素 .认为热丝对反应气体的分解效率是关键因素 .热丝分解效率受热丝温度 Tf 热丝周围碳源浓度、尤其是受热丝碳化程度的影响 .对热丝碳化越充分导致金刚石晶核的孕育期越短。

Some effects on the duration of HFCVD diamond nuclei incubation were first summarized. It was convinced that the decomposition efficiency of filament, which is affected by filament temperature, methane concentration near the filament, and especially by the carburization degree of filament, is a critical effect. The phenomenon that the higher filament carburization degree will cause the shorter duration of diamond nuclei incubation and the easier possibility of enhancing the nucleation density was elucidated.