在不同衬底上用纳米引晶法选择性生长金刚石薄膜

Selective Growth of Polycrystalline Diamond Film by Selectively Seeding with Nanocrystalline Diamond Powder

采用光刻工艺和纳米引晶技术 ,在抛光的单晶 Si衬底上形成带有超细金刚石纳米粉的引晶图案 ,并利用引晶处与抛光 Si处金刚石成核密度的巨大差异 ,在光滑的 Si3N4 和 Mo衬底上实现金刚石薄膜的高选择性生长 .

A novel process has been proposed to grow the polycrystalline diamond film selectively by selectively seeding with the diamond powder of 5 nm average size. A high selectivity was achieved in the process, which had an advantage over the conventional SAD method. The process requires only a few steps and avoids the surface defects in the routine process. Moreover, the diamond films were selectively grown on Si 3N 4 and Mo substrates by the new method.