阳极氧化法制备壁垒型Al_2O_3绝缘膜的研究

Fabrication of Barrier Anodic Alumina Insulation Membrane by Anodization

采用阳极氧化法在Al膜上制备具有绝缘性能的壁垒型Al2O3膜,研究不同成分比例的电解液、阳极氧化电压对壁垒型Al2O3膜性能的影响。利用能量分散谱和扫描电镜观测壁垒型Al2O3膜的元素组成、表面形貌及厚度,并对其绝缘耐压性进行了测试。结果表明,所制备的Al2O3膜厚度均为纳米量级,在95%乙二醇,1.9%癸二酸铵,3.1%硼酸的电解液中,以300V恒定电压制备的壁垒型Al2O3膜拥有很好的绝缘性能,击穿场强可达5.25MV/cm。

The barrier anodic alumina membranes with good insulation performance were prepared via chemical route by anodization of pure Al coatings,1 μm thick,deposited by magnetron sputtering on glass substrates.The impacts of the preparation conditions,including the compositions of the electrolytes,and anodization voltage on its property of the membrane were evaluated.Its microstructures were characterized with scanning electron microscopy and energy dispersive spectroscopy.Under the optimized conditions：a solution of 95% glycol,1.9% ammonium sebacate,and 3.1 boracic acid,the high quality Al2O3 membrane was obtained.The measured results show that the Al2O3 membrane,a few nm in thickness,possesses an excellent insulation,with a breakdown field of 5.25 MV/cm.