离子镀Ti(1-x)Al_xN涂层的形貌及力学性能研究

Growth and Property Characterization of Ion Plated Ti(1-x)Al_xN Coating

采用多弧离子镀和磁过滤阴极电弧离子镀技术制备了Ti1-xAlxN涂层。研究了工艺参数对用Ti∶Al=1∶1的TiAl合金靶制备的Ti1-xAlxN涂层表观颜色的影响,以及以获得深色Ti1-xAlxN涂层为目的时工艺参数对涂层性能的影响。结果表明:不同工艺参数对Ti1-xAlxN涂层表观颜色的影响大小依次为基体偏压,真空度,沉积温度,霍尔离子源功率;离子镀Ti1-xAlxN涂层的膜基结合力较好,在脉冲偏压-150V、直流偏压-15 V附近有硬度最高,在较高真空度、较高沉积温度、较高基体负偏压下制备的Ti1-xAlxN涂层的磨擦学性能较好。

The Ti1-xAlxN coatings were deposited by multi-arc ion plating and filtered cathodic arc ion plating on 304 stainless steel substrates.The influence of the deposition conditions,including the target contents,pressure,substrate temperature,bias voltage,and Hall ion source power,on the apparent color of the coating were evaluated.The results show that the deposition conditions affect the microstructures and mechanical properties of the coating to a varying degree.The impact factors of the substrate bias,pressure,deposition temperature,and Hall ion source power follows a descending order.Strong interfacial adhesion was observed.The coatings,deposited at a pulsed voltage of-150 V,a dc voltage of -15 V,display the highest hardness.We found that the coatings,deposited at lower pressure,higher substrate temperature and a larger negative bias voltage,possess better tribological properties.