摘要
做好扫描电镜的日常维护工作并及时排除仪器常见故障是延长扫描电镜的使用寿命、维修周期和节约维修费用的重要手段。本文详细介绍了对JSM-6700F冷场发射扫描电镜进行日常维护的关键操作事项,并通过对JSM-6700F冷场发射扫描电镜实际操作中遇到的常见故障原因进行分析,阐述了真空系统、仪器控制系统电路、电子枪以及软件等方面故障的处理方法。
Good daily maintenance and in-time fault resolution of scanning electron microscope are important means for lengthening its operating life,extending maintenance period,and saving maintenance fee.In this paper,the key operations of daily maintenance on JSM-6700F cold field scanning electron microscope are presented.The resolution methods for the faults that occurred in vacuum system,circuit of instrumental controlling system,electron gun,and software are introduced in detail with analyzing the corresponding reasons for the faults in JSM-6700F cold field scanning electron microscope.
出处
《现代科学仪器》
2012年第6期184-187,共4页
Modern Scientific Instruments
基金
国家自然科学基金(10974201)
福建省自然科学基金(2009J05139)
关键词
扫描电镜
日常维护
故障排除
Scanning electron microscope
Daily maintenance
Fault resolution
