碳离子在铝中的能量歧离和表面粗糙度

Energy Straggling of Carbon Ions in Aluminum and Surface Roughness

用金标记卢瑟福背散射法测量了 2 .0～ 5.4Me V的 12 C离子在蒸镀在 K4玻璃衬底上的 Al膜中的能量歧离 .由实验得出了零表面粗糙度的能量歧离 .本结果与

The energy straggling of 2.0～5.4 MeV carbon ions in aluminum films evaporated onto K4 glass substrates was measured with the Au marked RBS method. The surface roughness with zero was obtained from experiment. It supplied a method for determination of the surface roughness with zero. The present result was compared with the Bohr theory and the results of published experimental work It is shown that the Bohr theory is not appropriate to description of the energy straggling of low energy heavy ion in films, and the surface roughness could seriusly affect the energy straggling. We have to pay more attention to both points mentioned above in the ion beam analyses, ion implantations and some nuclear physics expriments.