溶胶-凝胶法制备氧化铝薄膜

Preparation of Aluminum Film by Sol-gel Method

以Al(NO3)3·9H2O作为前驱体制备AlOOH溶胶,通过提拉法在不锈钢表面形成氧化物薄膜。探讨了热处理制度和表面处理对薄膜形成过程的影响,并通过XRD和SEM等分析手段对氧化铝薄膜形成过程的物相组成和表面质量进行了分析。实验结果表明:温度在500～800℃,升温速率控制在1.5℃/min,可以得到表面致密的氧化铝薄膜,所制得的薄膜成分以晶态氧化铝和非晶态氧化铝共存,其中晶态氧化铝以γ-氧化铝的形式存在。

The oxide film was formed on the stainless steel surface with infiltration process through sol-gel technology, while Al（NO2）3·9H2O as raw material for AlOOH sol. Influences on the film formation process with thermal treatment and surface modifi-cation were concerned. Phase composition and surface quality of the alumina film formation were characterized by XRD and SEM anal- ysis. Experimental results show that a dense alumina film can be obtained under heating at 500 ℃ to 800 ℃ ,controlling temperature rise of 1.5 ℃/min. The obtained film consists of the crystalline γ-alumina alumina and amorphous alumina.