以四氯化硅水热法合成高纯微米级石英晶体

Synthesis of high purity micron-sized quartz from SiCl4by hydrothermal method

采用水热法,以多晶硅副产物四氯化硅为原料,碳酸钠为矿化剂,研究了不同温度下石英晶体的合成。并利用X射线衍射仪(XRD)、扫描电镜(SEM)和能谱仪(EDS)对其物相结构、形貌和成分进行了表征。结果表明,合成的石英晶体为典型的低温α-石英,呈棱柱状轴向生长;随着温度的升高,晶粒尺寸逐渐增大,在220℃下制备得到的晶粒最大,平均粒径为8μm左右;但当温度为230℃时,制备的石英晶体的晶粒反而变小。

Quartz crystal was synthesized from silicon tetrachloride of polysilicon by-product by hydrothermal method with anhydrous sodium carbonate as mineralizer at different reaction temperatures.XRD, SEM, and EDS were used to characterize the structure, morphology, and chemical components of the as-prepared quartz crystals.Resuhs showed that the crystal phase of the as-prepared quartz was typical low-temperature α-Si02, which was prismatic and grew in the direction of axial;the size of quartz crystal increased gradually with the increasing of reaction temperature, appeared to have the maximum size at 220 ℃, and average particle size was about 8μm ; but when reaction temperature reached 230 ℃, the size of α-Si02 crystal became smaller.