CoCr的选择蒸镀和垂直磁化膜的研究

The Study on Selective Evaporation and Perpendicular Magnetization Films of CoCr

用电子束蒸镀CoCr制备垂直磁化膜时发现膜成分受众多因素影响,而成为CoCr膜实现垂直磁化的首要问题。选择蒸发是造成成分控制困难的主要原因。本文对有关问题进行了研究,分析计算了理论公式,与实验作了比较,结果符合得很好;对选择蒸发及其对各种制膜工艺的影响;及CoCr膜垂直磁化性能;膜的微观结构和磁畴,都进行了研究和必要的讨论。

When using electron beam evaporates CoCr for preparing perpendicular magnetization films, it is found that the content of the film is influenced by many factors, and it is the most important problem for obtaining perpendicular magnetization for the CoCr films. The selective evaporation is the main reason which has caused the difficu- Ity on content control. This paper has studied these related problems, analyzed and calculated the theoritical equation of the CoCr selective evaporation, compared it with the experimental results, and obtained very good agreement between them. Discussions have also been given for the selective evaporation; the influences of it on a numbers of film preparation processes; the perpendicular magnetization properties; the micros-tructure and the magnetic domains of the CoCr films.