摘要
采用单频、基横模的氩离子激光器的0.488μm谱线及BP-212正性光致抗蚀剂,研制出高质量的全息平面反射光栅,空间频率为2400条/mm的光栅,其一级衍射波前象差<λ/6,紫外区的衍射效率η≈45%,已批置用于WSP-1型平面光栅摄谱仪及其它光谱仪和单色器。
A superior hologrphic flat reflection grating with 0.448μm spectral line obtained from a single frequency Ar+ laser is fabricated. Its characteristics are: Spatial frequency ≈ 2400 条/mm-1 , wave aberration of first order diffraction < λ / 6 , diffraction efficiency in ultraviolet domain= 45% . This grating has become a necessary component of WSP-1 model flat grating spectrograph for batch process and is used in other spectrograph or monchrometer.
出处
《北京工业大学学报》
CAS
CSCD
1991年第4期38-41,共4页
Journal of Beijing University of Technology
关键词
全息光栅
干涉仪
holographic grating, interferometer