偏压和氮气流量对Ni+CrAlYSiN纳米复合涂层性能的影响

Effects of Bias Voltage and Nitrogen Flow Rate on the Structure and Properties of Ni+Cr AlYSiN Nanocrystalline Composite Coatings

采用真空电弧蒸镀技术在高温合金K417上制备Ni+CrAlYSiN纳米复合涂层,用SEM,EDX,TEM等手段表征了复合涂层的形貌、成分和结构,研究了基体负偏压和氮气流量对涂层的形貌、结构、成分和性能的影响。结果表明,涂层主要由γ-Ni,fcc-AlN和fcc-CrN纳米晶组成;基体偏压由-100V增至-300 V,熔滴的尺寸和数量均减小,涂层中的晶粒尺寸由50 nm减小为30 nm。随着偏压的增大,涂层中N含量下降,Ni含量增加,Cr和Al的含量先增加后减少;涂层的沉积速率下降。随着氮气流量的增加,涂层中的N含量增加,Ni、Cr和Al含量下降;涂层的沉积速率先增加后减小。偏压为-300V、氮气流量为225 mL·min^(-1)时,涂层的硬度达最大值(9.80 GPa),比NiCrAlYSi涂层的硬度提高约60%,而耐磨性提高约30%。

Ni＋CrAIYSiN composite coatings were prepared on K417 by vacuum arc evaporation from a NiCrA1YSi target in Ar/N2 mixture. Characterization of the coatings was carried out using SEM, EDX and TEM. The results show that the composite coatings mainly consist of nanocrystalline y-Ni, fcc-AIN and fcc-CrN. Increase of the bias from -100 V to -300 V leads to a decrease of the grain size, the number and size of droplets. With increasing bias voltage, the content of N decreased, Ni increased, and the contents of Cr and AI initially increased and then decreased; the deposition rate decreased. With increaseing the nitrogen flow rate, the content of N increased and those of Ni, Cr and AI decreased; while the deposition rate initially increased and then decreased. Comparing to the NiCrAIYSi coating, the Ni ＋ CrAIYSiN coating with a maximum hardness about 9.80 GPa improved about 60% in hardness and 30% in wear resistance.