摘要
研究了一种阴极弧沉积方法。将高端刀具放置在等电势的半球状栅网中进行钛氮化物沉积,在200V的负偏压下,完全避免了电弧的产生,X射线光电能谱(XPS)的结果表明在室温下成功地在刀具材料上沉积了钛氮化物薄膜。
An arcing free cathodic arc deposition is described.High-end cutting tools are put inside an equal-potential semi-sphere mesh when conducting titanium oxy-nitride deposition.Arcing is completely avoided during the deposition up to a negative bias of-200 V.X-ray photoelectron spectroscopy（XPS） reveals successful deposition of titanium oxy-nitride films on the cutting tools at room temperature.
出处
《制造技术与机床》
CSCD
北大核心
2012年第12期133-135,共3页
Manufacturing Technology & Machine Tool
关键词
阴极弧过滤
氮化钛
氧化钛
高端刀具
X射线光电子能谱分
Filtered Cathodic Vacuum Arc
Titanium Nitride
Titanium Oxide
High-end Cutting Tools
X-ray Photoelectron Spectroscopy
