期刊文献+

基于MEMS加工工艺的同轴腔体滤波器设计 被引量:1

Design of Coaxial Cavity Filter Based on MEMS Processing
下载PDF
导出
摘要 为了实现无线电通信系统小型化的需求,文章提出了一种基于MEMS加工工艺的六腔同轴腔体滤波器的设计方案。该设计使用ansoft HFSS完成滤波器模型建立,进一步利用ansoft designer与ansoft HFSS联合仿真,优化并实现滤波器模型设计。结合MEMS加工工艺的特点,尽量简化同轴腔体滤波器结构,并采用方同轴线实现输入输出端口设计。 A design of a six-degree coaxial cavity fiher based on MEMS process is presented in this paper, which can satisfy the requirement of miniaturizing the radio communication system. The filter model is established with Ansoft HFSS, and fur- ther simulated with Ansoft Designer and Ansoft HFSS co-simulation to achieve optimization. Benefiting from the ch aracteris- tics of MEMS process, the structure of the coaxial cavity filter is well simplified. Meanwhile, square coaxial is applied to design input and output ports.
出处 《空间电子技术》 2012年第4期108-112,122,共6页 Space Electronic Technology
基金 博士后基金项目资助(编号:20110491639) 中央高校基本科研业务费(编号:CHD2011JC049 CHD2011ZD004)
关键词 同轴腔体滤波器 MEMS加工工艺 方同轴线 联合仿真 Coaxial cavity filter MEMS processing Square coaxial Co-simulation
  • 相关文献

参考文献6

  • 1云振新.RF/微波无线系统中的MEMS技术[J].微纳电子技术,2002,39(2):6-11. 被引量:6
  • 2Matthaei G L. Comb-line band-pass filters of narrow or moderate band-width[J].Microwave Journal,1963.82-91.
  • 3刘景全,蔡炳初,陈迪,朱军,赵小林,杨春生.SU-8胶及其在MEMS中的应用[J].微纳电子技术,2003,40(7):132-136. 被引量:17
  • 4Gunston M A R. Microwave Transmission-Line Impedance Data[M].Van Nostrand Reinholol Company,London,1972.3-23.
  • 5Cameron R J. Advanced Coupling Matrix Synethesis Techniques for Microwave Filters[J].IEEE Transactions on Microwave theory and Techniques,2003.1-10.
  • 6John B Ness. A unified approach to the design,measurement,and tuning of coupled-resonator filters[J].IEEE Transactions on Microwave theory and Techniques,1998.343-351.

二级参考文献7

  • 1王阳元.21世纪微电子技术展望[J].21世纪元器件,2001,:10-11.
  • 2丁衡高.微系统与微米/纳米技术及其发展[A]..第四届微米/纳米技术学术会议[C].中国:上海,2000.1-6.
  • 3周兆英 叶雄英.微型机电系统的技术特点及其产业化分析[A]..第四届微米/纳米技术学术会议[C].中国:上海,2000.7-12.
  • 4Randy J, He'tor J, De los Santors. MEMS for RF/mirowave wireless applications: The next wave. Microwave Journal, 2001,(3): 20~38.
  • 5He'tor J, De Los Santors, Randy J R. MEMS for RF microwave wireless applications: The next wave-part Ⅱ. Microw ave Journal,2001, (7): 142~152.
  • 6Qun wu bumman kim. MEMS technology moves inereasingly toward microwave applications. Microwave & RF, 2001, (7): 102.
  • 7田文彬.微机械技术与市场共同发展[J].半导体情报,2001,38(2):12-14. 被引量:3

共引文献21

同被引文献8

  • 1JOB H, van LERBERGHE L M, MOTSEGOOD K M, et al. Three-dimensional micro-channel fabrication in polydimethylsi- loxane (PDMS) elastomer [J]. Journal of Microelectrome- chanical Systems, 2000, 9 (1) : 76- 81.
  • 2WU H K, ODOM T W, CHIU D T, et al. Fabrication of complex three-dimensional mierochannel systems in PDMS [J]. Journal of the American Chemical Society, 2003, 125 (2) : 554 - 559.
  • 3SHAO G C, QIU W P, WANG W J. Fast replication of out- of-plane microlens with polydimethylsiloxane and curable poly- mer (NOA73) [J]. Microsystem Technologies, 2010, 16 (8/9): 1471 - 1477.
  • 4KIM Y S, SUH K Y, LEE H H. Fabrication of three-dimen- sional microstructures by soft molding [J]. Applied PhysicsLetters, 2001, 79 (14)= 2285-2287.
  • 5YANG R0 WANG W J. A numerical and experimental study on gap compensation and wavelength selection in UVqithogra- phy of ultra-high aspect ratio SU - 8 mierostructures [J]. Sensors and Actuators= B, 2005, 110 (2): 279-288.
  • 6YANG R, WANG W J. Out-of-plane polymer refractive mic- rolens fabricated based on direct lithography of SU - 8 [J]. Sensors and Actuators: A, 2004, 113 (1). 71-77.
  • 7李倩,杨志,胡小东.MEMS毫米波滤波器的设计与制作[J].微纳电子技术,2010,47(3):170-173. 被引量:10
  • 8刘景全,蔡炳初,陈迪,朱军,赵小林,杨春生.SU-8胶及其在MEMS中的应用[J].微纳电子技术,2003,40(7):132-136. 被引量:17

引证文献1

二级引证文献1

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部