摘要
通过以WEDG放电加工手段制作微细超声加工用工具 ,在采用工件加振方式的微细超声加工机上对碳酸玻璃、半导体硅等硬脆材料试件进行微孔加工的实验 ,来探讨在某一特定加工条件下工具材料、工件材料、工件的振幅、加工静载荷、磨料悬浮液浓度、工具长度及工件尺寸等重要因素对加工速度、工具损耗率的影响 ,为微细超声加工技术的实用化提供参考依据。
Experiments were made on a ultrasonic machining tool with work piece adhered to ultrasonic transducer head,to machine micro holes on hard and brittle materials such as soda glass and Si,to study the effects of tool materials,work piece materials ,amplitude,machining load,slurry concentration ,tool length and the size of work piece on machining rate and wear ratio.In this experiment,the micro tool was made through WEDG.
出处
《电加工与模具》
2000年第3期29-32,共4页
Electromachining & Mould